Invention Grant
- Patent Title: Optical chip ID definition using nanoimprint lithography
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Application No.: US16573530Application Date: 2019-09-17
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Publication No.: US11056439B2Publication Date: 2021-07-06
- Inventor: Daniel Piper
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L23/29 ; H01L21/56

Abstract:
An optically readable chip ID is provided to an imprintable material that is formed as a last level of an integrated circuit (IC) chip using nanoimprint lithography. The nanoimprint lithography process provides an array of indentations into the imprintable material that is typically arranged in a hexadecimal pattern. The hexadecimal pattern includes one or more optically readable characters which combine to encode chip location identification data. The chip location identification data identifies a unique location of the product chip on a wafer prior to dicing.
Public/Granted literature
- US20200013725A1 OPTICAL CHIP ID DEFINITION USING NANOIMPRINT LITHOGRAPHY Public/Granted day:2020-01-09
Information query
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