Invention Grant
- Patent Title: Semiconductor device with multiple trench structures
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Application No.: US16533958Application Date: 2019-08-07
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Publication No.: US11056484B2Publication Date: 2021-07-06
- Inventor: Ryu Kamibaba
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2018-196616 20181018
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/739 ; H01L29/861 ; H01L29/10 ; H01L29/423 ; H01L29/417

Abstract:
A semiconductor device includes an IGBT region extending from a front surface to a rear surface of a semiconductor substrate including a first conductive type drift layer, and a diode region lying adjacent to the IGBT region. The IGBT region includes a second conductive type base layer on a side facing the front surface and a first trench portion penetrating the base layer. The first trench portion includes a first gate electrode, a second gate electrode provided directly below the first gate electrode, and an insulating film provided on a side surface of the first gate electrode, between the first gate electrode and the second gate electrode and in a position to contact the second gate electrode. The diode region includes a second conductive type anode layer and a second trench portion including a dummy gate electrode on the side facing the front surface.
Information query
IPC分类: