Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16807633Application Date: 2020-03-03
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Publication No.: US11056572B2Publication Date: 2021-07-06
- Inventor: Xianfeng Ni , Qian Fan , Wei He
- Applicant: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
- Current Assignee: SUZHOU HAN HUA SEMICONDUCTOR CO., LTD.
- Current Assignee Address: CN Jiangsu
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: CN201810470252.9 20180517
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/778 ; H01L29/06 ; H01L21/311 ; H01L21/308 ; H01L21/265 ; H01L29/78

Abstract:
The present application provides a semiconductor device and a method for manufacturing the same. The method includes: sequentially forming a buffer layer and a barrier layer on a substrate, wherein a two-dimensional electron gas is formed between the buffer layer and the barrier layer; etching a source region and a drain region of the barrier layer to form a trench on the buffer layer, and doped layers are formed on the trench; forming a passivation layer on the barrier layer and the doped layers, and etching the passivation layer to expose a portion of the barrier layer, wherein the portion of the barrier layer is in contact with the doped layers; and doping ions into a portion of the buffer layer in contact with the portion of the buffer layer.
Information query
IPC分类: