Invention Grant
- Patent Title: Thin-film transistor and manufacturing method for the same
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Application No.: US16080596Application Date: 2018-08-01
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Publication No.: US11056577B2Publication Date: 2021-07-06
- Inventor: Hui Xia , Zhiwei Tan
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Agent Leong C. Lei
- Priority: CN201810805694.4 20180720
- International Application: PCT/CN2018/098004 WO 20180801
- International Announcement: WO2020/015016 WO 20200123
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/66 ; H01L29/786 ; H01L29/417

Abstract:
A thin-film transistor and a manufacturing method for the same are disclosed. The method includes steps of: depositing a first metal layer on a substrate; depositing a semiconductor material layer on the first metal layer, and using a first photolithography process to perform a patterning process to the semiconductor material layer in order to form a semiconductor active layer depositing a second metal layer on the first metal layer and the semiconductor active layer, and using a second photolithography process to perform a patterning process to the first metal layer and the second metal layer in order to obtain a first electrode, a second electrode, and a third electrode, wherein the first electrode and the second electrode are disposed at an interval, the first electrode is disposed on the substrate, the second electrode is disposed between the substrate and the semiconductor active layer, and the third electrode is disposed on the semiconductor active layer, projections of the second electrode and the third electrode on a horizontal plane are overlapped; the first electrode is formed by the first metal layer and the second metal layer. The fabrication of the first electrode, the second electrode, the third electrode, and the active layer can be completed by only two photolithography processes, which reduce process steps and reduce cost.
Public/Granted literature
- US20210098607A1 THIN-FILM TRANSISTOR AND MANUFACTURING METHOD FOR THE SAME Public/Granted day:2021-04-01
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