Invention Grant
- Patent Title: Mesa formation for wafer-to-wafer bonding
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Application No.: US16436794Application Date: 2019-06-10
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Publication No.: US11056611B2Publication Date: 2021-07-06
- Inventor: William Padraic Henry , James Ronald Bonar , Gareth Valentine
- Applicant: Facebook Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Facebook Technologies, LLC
- Current Assignee: Facebook Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/20 ; G02B27/00

Abstract:
Disclosed herein are techniques for wafer-to-wafer bonding for manufacturing light emitting diodes (LEDs). In some embodiments, a method of manufacturing LEDs includes etching a semiconductor material to form a plurality of adjacent mesa shapes. The semiconductor material includes one or more epitaxial layers. The method also includes forming a passivation layer within gaps between the adjacent mesa shapes and bonding a base wafer to a first surface of the semiconductor material.
Public/Granted literature
- US20200083402A1 MESA FORMATION FOR WAFER-TO-WAFER BONDING Public/Granted day:2020-03-12
Information query
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