Invention Grant
- Patent Title: Method for treating sulfur hexafluoride using radiation and apparatus for collecting and treating by-products
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Application No.: US15108754Application Date: 2014-11-25
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Publication No.: US11058984B2Publication Date: 2021-07-13
- Inventor: In-Ha Jung , Jae-Yong Ryu , Myun-Joo Lee
- Applicant: KOREA ATOMIC ENERGY RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: KOREA ATOMIC ENERGY RESEARCH INSTITUTE
- Current Assignee: KOREA ATOMIC ENERGY RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: McCoy Russell LLP
- Priority: KR10-2013-0166859 20131230,KR10-2014-0054514 20140508
- International Application: PCT/KR2014/011366 WO 20141125
- International Announcement: WO2015/102229 WO 20150709
- Main IPC: B01D53/00
- IPC: B01D53/00 ; B01D53/73 ; C01B7/19 ; B01D53/18 ; C01D3/02 ; B01D5/00 ; B01D53/14 ; B01D53/68 ; C01F11/22 ; B01D53/48 ; B01J19/08 ; C01B17/45 ; B01D53/32 ; B01D53/96 ; B01D53/76 ; C01B17/02 ; C01G1/06 ; C01B17/04

Abstract:
Provided are a method for treating sulfur hexafluoride and an apparatus for collecting and treating by-products. The method for treating sulfur hexafluoride, and the apparatus for collecting and treating by-products according to the present invention are a significantly effective method and apparatus capable of safely treating sulfur hexafluoride at low cost.
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