Invention Grant
- Patent Title: Method and device for producing planar modifications in solid bodies
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Application No.: US16067946Application Date: 2016-12-12
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Publication No.: US11059202B2Publication Date: 2021-07-13
- Inventor: Ralf Rieske , Christian Beyer , Christoph Guenther , Jan Richter , Marko Swoboda
- Applicant: SILTECTRA GmbH
- Applicant Address: DE Dresden
- Assignee: SILTECTRA GmbH
- Current Assignee: SILTECTRA GmbH
- Current Assignee Address: DE Dresden
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102016000051.1 20160105
- International Application: PCT/EP2016/080667 WO 20161212
- International Announcement: WO2017/118533 WO 20170713
- Main IPC: B23K26/03
- IPC: B23K26/03 ; B23K26/36 ; B23K26/40 ; B28D5/00 ; B23K103/16

Abstract:
A method for creating modifications in a solid-state material is described, wherein a crack guidance region for guiding a crack for separating a solid-state layer from the solid-state material is predetermined by the modifications. The method includes: moving the solid-state material relative to a laser processing system; successively emitting a plurality of laser beams from the laser processing system to the solid-state material to create at least one modification within the solid-state material; and continuously adjusting the laser processing system for defined focusing of the plurality of laser beams and/or for adjustment of energy of the plurality of laser beams as a function of at least one parameter.
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