Invention Grant
- Patent Title: Production method of polishing composition
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Application No.: US16133186Application Date: 2018-09-17
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Publication No.: US11059996B2Publication Date: 2021-07-13
- Inventor: Yoshihiro Izawa
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-181451 20170921
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09G1/04 ; C09K3/14 ; H01L21/304 ; H01L21/306

Abstract:
A method for producing a polishing composition including: preparing a first dispersion liquid by mixing a dispersing element containing abrasive grains and a dispersing medium with a pH adjusting agent, and changing the pH of the dispersing element so as to pass an isoelectric point of the abrasive grains; and preparing a second dispersion liquid by mixing the first dispersion liquid with an electrical conductivity adjusting agent.
Public/Granted literature
- US20190085210A1 PRODUCTION METHOD OF POLISHING COMPOSITION Public/Granted day:2019-03-21
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