Invention Grant
- Patent Title: Epitaxial barium titanate thin films using a highly volatile Ba(hfa)2 triglyme precursor
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Application No.: US15221094Application Date: 2016-07-27
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Publication No.: US11060184B2Publication Date: 2021-07-13
- Inventor: Bruce W. Wessels , Young Kyu Jeong
- Applicant: Northwestern University
- Applicant Address: US IL Evanston
- Assignee: Northwestern University
- Current Assignee: Northwestern University
- Current Assignee Address: US IL Evanston
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C30B25/02 ; C30B29/32 ; C23C16/455 ; C23C16/46
Abstract:
Ferroelectric barium titanate (BaTiO3) epitaxial films grown by metal-organic chemical vapor deposition using a barium precursor having a low melting point and a stable vapor pressure.
Public/Granted literature
- US20170029943A1 Epitaxial Barium Titanate Thin Films Using a Highly Volatile Ba(hfa)2 Triglyme Precursor Public/Granted day:2017-02-02
Information query
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