Invention Grant
- Patent Title: Burn-in test apparatus for semiconductor devices
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Application No.: US16303260Application Date: 2017-05-26
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Publication No.: US11061069B2Publication Date: 2021-07-13
- Inventor: Ballson Gopal , Jesse Killion
- Applicant: KES SYSTEMS, INC.
- Applicant Address: US AZ Tempe
- Assignee: KES SYSTEMS, INC.
- Current Assignee: KES SYSTEMS, INC.
- Current Assignee Address: US AZ Tempe
- Agency: Botos Churchill IP Law LLP
- International Application: PCT/US2017/034647 WO 20170526
- International Announcement: WO2017/210108 WO 20171207
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04

Abstract:
Apparatus and methods provide burn-in testing for semiconductors. A burn-in test apparatus (1) may include an outer housing forming an aperture with a test socket to receive a tile or wafer. The tile or wafer may include semiconductor device(s) for burn-in testing. The apparatus may include a thermal control unit to regulate testing temperature and/or drive electronics for powering the socket. The apparatus may include an inlet for gas pressure from a pressure source. The apparatus may include a lid covering the aperture when a tile/wafer is at the test socket. The apparatus may include a seal carrier in the aperture to form a pressure chamber with a surface of the tile. The pressure chamber may pneumatically couple with the inlet. Pressure of the pressure chamber may act upon the tile/wafer to urge a device under testing into thermal and/or electrical contact with the socket for conducting the burn-in test.
Public/Granted literature
- US20190204378A1 SYSTEM AND METHODS FOR SEMICONDUCTOR BURN-IN TEST Public/Granted day:2019-07-04
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