Invention Grant
- Patent Title: High-resolution position encoder with image sensor and encoded target pattern
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Application No.: US15940549Application Date: 2018-03-29
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Publication No.: US11061338B2Publication Date: 2021-07-13
- Inventor: Jonathan Kyle Wells , Paul Derek Coon , Matthew D. Rosa , Johnathan Marquez , Michael B. Binnard , Steven Douglas Slonaker , Daniel Gene Smith , Stephen P. Renwick , Brett Herr
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Roeder & Broder LLP
- Agent Steven G. Roeder
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02K41/03 ; G01D5/347 ; G03F9/00

Abstract:
A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.
Public/Granted literature
- US20180217510A1 HIGH-RESOLUTION POSITION ENCODER WITH IMAGE SENSOR AND ENCODED TARGET PATTERN Public/Granted day:2018-08-02
Information query
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