Invention Grant
- Patent Title: Apparatus for containing a substrate and method of manufacturing the apparatus
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Application No.: US16704086Application Date: 2019-12-05
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Publication No.: US11061339B2Publication Date: 2021-07-13
- Inventor: Chia-Ho Chuang , Hsin-Min Hsueh , Ming-Chien Chiu
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW108127001 20190730
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.
Public/Granted literature
- US20210033989A1 APPARATUS FOR CONTAINING A SUBSTRATE AND METHOD OF MANUFACTURING THE APPARATUS Public/Granted day:2021-02-04
Information query
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