Invention Grant
- Patent Title: Vertical transistors having uniform channel length
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Application No.: US16364651Application Date: 2019-03-26
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Publication No.: US11062955B2Publication Date: 2021-07-13
- Inventor: Choonghyun Lee , Takashi Ando , Jingyun Zhang , Alexander Reznicek , Pouya Hashemi
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert Sullivan
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/78 ; H01L27/088 ; H01L29/10 ; H01L21/8238

Abstract:
A method for fabricating a semiconductor device including vertical transistors having uniform channel length includes defining a channel length of at least one first fin formed on a substrate in a first device region and a channel length of at least one second fin formed on the substrate in a second device region. Defining the channel lengths includes creating at least one divot in the second device region. The method further includes modifying the channel length of the at least one second fin to be substantially similar to the channel length of the at least one first fin by filling the at least one divot with additional gate conductor material.
Public/Granted literature
- US20200312722A1 VERTICAL TRANSISTORS HAVING UNIFORM CHANNEL LENGTH Public/Granted day:2020-10-01
Information query
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