Invention Grant
- Patent Title: Method for manufacturing display substrate
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Application No.: US16577578Application Date: 2019-09-20
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Publication No.: US11063069B2Publication Date: 2021-07-13
- Inventor: Feng Guan , Chen Xu , Zhi Wang , Liwei Liu , Lei Chen , Xueyong Wang , Yan Chen
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201811318407.3 20181107
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02

Abstract:
A method for manufacturing a display substrate is provided to include: forming an amorphous silicon layer on a base substrate; irradiating at least part of the display region through a mask plate with a laser, to convert a portion of the amorphous silicon layer in the irradiated part of the display region corresponding to channel regions of active layers of transistors into polycrystalline silicon by a laser annealing process; irradiating at least part of the peripheral region with a laser, to convert the amorphous silicon layer in the irradiated part of the peripheral region into polycrystalline silicon; and forming the active layers of the transistors from the amorphous silicon layer which is converted to polycrystalline silicon by a patterning process.
Information query
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