Invention Grant
- Patent Title: Method for fabricating superconducting devices using a focused ion beam
-
Application No.: US16255499Application Date: 2019-01-23
-
Publication No.: US11063201B2Publication Date: 2021-07-13
- Inventor: Shane A. Cybart , Ethan Y. Cho , Robert C. Dynes , Travis J. Wong
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant Address: US CA Oakland
- Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US CA Oakland
- Agency: Musick Davison LLP
- Agent Eleanor Musick
- Main IPC: G01R33/035
- IPC: G01R33/035 ; H01L39/24 ; H01L27/18
Abstract:
Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.
Public/Granted literature
- US20190288178A1 METHOD FOR FABRICATING SUPERCONDUCTING DEVICES USING A FOCUSED ION BEAM Public/Granted day:2019-09-19
Information query
