Invention Grant
- Patent Title: Warpage reduction device and warpage reduction method
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Application No.: US16616613Application Date: 2018-04-09
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Publication No.: US11065805B2Publication Date: 2021-07-20
- Inventor: Tai O. Chung , Dae Ho Jung , In Su Kim , Gi Hong Seo
- Applicant: EO TECHNICS CO., LTD.
- Applicant Address: KR Anyang-si
- Assignee: EO TECHNICS CO., LTD.
- Current Assignee: EO TECHNICS CO., LTD.
- Current Assignee Address: KR Anyang-si
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: KR10-2017-0066386 20170529
- International Application: PCT/KR2018/004133 WO 20180409
- International Announcement: WO2018/221850 WO 20181206
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B29C51/10 ; B29C51/18 ; B29C51/42 ; H01L21/56 ; H01L23/00 ; B29L31/34

Abstract:
A warpage reduction device the present disclosure includes a jig having a warped shape capable of distributing stress of a workpiece, a light source heating the workpiece so as to be flat, a pressurizer applying pressure to the heated workpiece to be pressed against the jig so as to be deformed, a cooler cooling the deformed workpiece, and a controller controlling operations of the light source, the pressurizer, and the cooler.
Public/Granted literature
- US20200171738A1 WARPAGE REDUCTION DEVICE AND WARPAGE REDUCTION METHOD Public/Granted day:2020-06-04
Information query
IPC分类: