- Patent Title: Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
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Application No.: US16476609Application Date: 2017-11-16
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Publication No.: US11066295B2Publication Date: 2021-07-20
- Inventor: Philip Kaupmann , Stefan Pinter , Helmut Grutzeck , Jochen Franz , Joerg Muchow
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright Us LLP
- Agent Gerard Messina
- Priority: DE102017200352.9 20170111
- International Application: PCT/EP2017/079455 WO 20171116
- International Announcement: WO2018/130326 WO 20180719
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B26/10

Abstract:
A micromechanical component having a mount, an adjustable element, which is connected via at least one spring to the mount, and an actuator device, a first oscillatory motion of the adjustable element about a first axis of rotation and simultaneously a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, being excitable about a second axis of rotation in response to the actuator device; and the adjustable element being configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is adjustable by a resulting angular momentum about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to second axis of rotation. Also, a method for manufacturing a micromechanical component. Moreover, a method for exciting a motion of an adjustable element about a rotational axis.
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