Invention Grant
- Patent Title: Planar rotary air bearing stage
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Application No.: US16519331Application Date: 2019-07-23
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Publication No.: US11067124B2Publication Date: 2021-07-20
- Inventor: Nathan Lyons Brown , Quinn Matthew Wolf
- Applicant: ALIO Industries, Inc.
- Applicant Address: US CO Arvada
- Assignee: ALIO Industries, Inc.
- Current Assignee: ALIO Industries, Inc.
- Current Assignee Address: US CO Arvada
- Main IPC: F16C32/06
- IPC: F16C32/06 ; F16C29/02 ; G01B5/00 ; F16C41/00

Abstract:
Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.
Public/Granted literature
- US20200025248A1 PLANAR ROTARY AIR BEARING STAGE Public/Granted day:2020-01-23
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