Laser beam profile measurement device
Abstract:
A laser beam profile measurement device includes: a plate-like or block-like fluorescence generation element including an incidence surface on which a laser light is incident and an emission surface from which the laser light is emitted; a light separation element for separating fluorescence from the laser light, the fluorescence generated in the fluorescence generation element and emitted from the emission surface; and an image element for receiving the fluorescence. The fluorescence generation element includes a first film formed on the incidence surface thereof. The first film has a wavelength-to-reflectance characteristic of transmitting a wavelength λ1 of the laser light and reflecting a wavelength λ2 of the fluorescence. The first film has a wavelength-to-reflectance characteristic of transmitting a wavelength λ1 of the laser light and reflecting a wavelength λ2 of the fluorescence. The light separation element may include a second film having a wavelength-to-reflectance characteristic of transmitting the wavelength λ2 and reflecting the wavelength λ1 or a third film having a wavelength-to-reflectance characteristic of reflecting the wavelength λ2 and transmitting the wavelength λ1. The first film may further have a wavelength-to-reflectance characteristic of reflecting a wavelength λ0 between the wavelength λ1 and the wavelength λ2, while the second film may further have a wavelength-to-reflectance characteristic of reflecting the wavelength λ0. Alternatively, the first film may further have the wavelength-to-reflectance characteristic of reflecting the wavelength λ0 between the wavelength λ1 and the wavelength λ2, while the third film may further have a wavelength-to-reflectance characteristic of transmitting the wavelength λ0.
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