Invention Grant
- Patent Title: Inspection system
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Application No.: US16630606Application Date: 2018-05-11
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Publication No.: US11067624B2Publication Date: 2021-07-20
- Inventor: Kentaro Konishi , Hiroki Shikagawa , Jun Fujihara
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JPJP2017-139936 20170719
- International Application: PCT/JP2018/018314 WO 20180511
- International Announcement: WO2019/017050 WO 20190124
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/67 ; G01J5/00 ; G01R1/067 ; G01R1/073 ; H01L21/68

Abstract:
An inspection system includes: an inspection section provided with an inspection part having a plurality of inspection units each including a tester that performs an electrical inspection of an inspection target, and a probe card provided between the tester and the inspection target; and a loader section including an arrangement part in which a storage container for the inspection target is disposed, and a loader that delivers the inspection target between the storage container and the inspection section. The inspection part includes a plurality of inspection unit rows that are formed by arranging the plurality of inspection units in one horizontal direction and arranged in a plurality of tiers in a vertical direction. The arrangement part is provided on an end part side in one direction of the inspection part.
Public/Granted literature
- US20200158775A1 INSPECTION SYSTEM Public/Granted day:2020-05-21
Information query