Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method therefor
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Application No.: US16114179Application Date: 2018-08-27
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Publication No.: US11069701B2Publication Date: 2021-07-20
- Inventor: Kosei Noda , Takeshi Murata , Mitsuhiko Noda
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2018-052439 20180320
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11573

Abstract:
A semiconductor memory device includes a first conductive layer, second conductive layers extending in a first direction and stacked above the first conductive layer in a second direction, a third conductive layer between the first conductive layer and the second conductive layers, a memory pillar extending inside the second conductive layers in the second direction, a first insulating layer that isolates the second conductive layers in a third direction, and second insulating layers spaced from an end of the first insulating layer and extending in the third direction. The second insulating layers are spaced from an extension line of the first insulating layer that extends in the first direction. The first conductive layer includes a region that overlaps in the second direction a region where extension lines of the first and second insulating layers intersect, and the third conductive layer does not overlap this intersection region in the second direction.
Public/Granted literature
- US20190296038A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2019-09-26
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