Invention Grant
- Patent Title: Method for manufacturing thin film transistor, thin film transistor, and display apparatus
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Application No.: US16756934Application Date: 2020-03-23
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Publication No.: US11069723B2Publication Date: 2021-07-20
- Inventor: Shuaiyi Wang , Hui Tang , Peng Gao , Ke Zeng , Xiangfeng Li
- Applicant: CHENGDU CEC PANDA DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Chengdu
- Assignee: CHENGDU CEC PANDA DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: CHENGDU CEC PANDA DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Chengdu
- Agency: MacMillan, Sobanski & Todd, LLC
- Priority: CN201910431451.3 20190522
- International Application: PCT/CN2020/080724 WO 20200323
- International Announcement: WO2020/233220 WO 20201126
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12 ; H01L21/423

Abstract:
The present disclosure provides a method for manufacturing a thin film transistor, a thin film transistor, and a display apparatus. The method for manufacturing a thin film transistor includes: forming a gate layer on a substrate; forming a gate insulating layer on the gate layer; forming an active layer on the gate insulating layer; forming a source/drain layer on the active layer; and performing a plasma bombardment treatment on a surface of the active layer on which the source/drain layer is formed, and controlling the plasma bombardment treatment to be performed at a gas flow rate of 4K sccm to 70K sccm, at a pressure of 600 mTorr to 1200 mTorr, at a power of 4 KW to 12 KW for a treatment time of 10 s to 60 s.
Public/Granted literature
- US20210082965A1 Method for Manufacturing Thin Film Transistor, Thin Film Transistor, and Display Apparatus Public/Granted day:2021-03-18
Information query
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