Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor
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Application No.: US16701994Application Date: 2019-12-03
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Publication No.: US11069792B2Publication Date: 2021-07-20
- Inventor: Zhuofan Chen , Haiyang Zhang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: CN201611085085.3 20161201
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/66 ; H01L45/00 ; H01L27/24 ; H01L21/762 ; H01L21/8238 ; H01L29/06 ; H01L29/423 ; H01L29/78

Abstract:
The present disclosure relates to the technical field of semiconductors, and discloses a semiconductor device and a manufacturing method therefor. The manufacturing method may include: providing a semiconductor structure, where the semiconductor structure includes a semiconductor fin and an interlayer dielectric layer covering the semiconductor fin, the interlayer dielectric layer having an opening exposing a part of the semiconductor fin; forming a data storage layer at a bottom portion and a side surface of the opening; and filling a conductive material layer in the opening on the data storage layer. The present disclosure facilitate the manufacturing process of the semiconductor device and improves processing compatibility with the CMOS technology.
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