Invention Grant
- Patent Title: Shadow mask sidewall tunnel junction for quantum computing
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Application No.: US16908951Application Date: 2020-06-23
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Publication No.: US11069849B2Publication Date: 2021-07-20
- Inventor: Markus Brink , Sami Rosenblatt
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Douglas Pearson
- Main IPC: H01L39/22
- IPC: H01L39/22 ; H01L39/24 ; H01L39/02 ; H01L39/12 ; G06N10/00

Abstract:
A technique relates to forming a sidewall tunnel junction. A first conducting layer is formed using a first shadow mask evaporation. A second conducting layer is formed on a portion of the first conducting layer, where the second conducting layer is formed using a second shadow mask evaporation. An oxide layer is formed on the first conducting layer and the second conducting layer. A third conducting layer is formed on part of the oxide layer, such that the sidewall tunnel junction is positioned between the first conducting layer and the third conducting layer.
Public/Granted literature
- US20200321509A1 SHADOW MASK SIDEWALL TUNNEL JUNCTION FOR QUANTUM COMPUTING Public/Granted day:2020-10-08
Information query
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