Invention Grant
- Patent Title: Semiconductor structure and method of forming a semiconductor structure
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Application No.: US16601896Application Date: 2019-10-15
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Publication No.: US11075135B2Publication Date: 2021-07-27
- Inventor: Fei Zhou
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing; CN Shanghai
- Assignee: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Beijing; CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: CN201811368089.1 20181116
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/8234 ; H01L27/088 ; H01L23/367 ; H01L23/34

Abstract:
A semiconductor structure and a method for forming a semiconductor structure are disclosed. A form of a method for forming a semiconductor structure includes: providing a base; patterning the base, to form a substrate and fins protruding out of the substrate, where each fin includes a bottom fin and a top fin located on the bottom fin, and in a direction perpendicular to an extension direction of each fin, a width of the top fin is less than a width of the bottom fin; and forming an isolation structure on the substrate exposed by a fin, where the isolation structure covers at least a sidewall of the bottom fin, and a top of the isolation structure is lower than a top of the fin. In the present disclosure, a bottom fin with a larger width is formed, to increase the volume of the bottom fin, and the area of a contact surface of the fin and the substrate, and to correspondingly enhance an effect of dissipating heat generated during working of a device to the substrate, thereby improving the heat dissipation performance of the device, and to correspondingly improving a self-heating effect of the device, so that the device performance is further improved.
Public/Granted literature
- US20200161208A1 SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING A SEMICONDUCTOR STRUCTURE Public/Granted day:2020-05-21
Information query
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