Invention Grant
- Patent Title: Method of manufacturing nitride semiconductor light-emitting element
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Application No.: US15888627Application Date: 2018-02-05
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Publication No.: US11075320B2Publication Date: 2021-07-27
- Inventor: Tomoya Yamashita
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-019717 20170206
- Main IPC: C30B25/02
- IPC: C30B25/02 ; C30B29/40 ; H01L21/02 ; H01L33/00 ; H01L33/04 ; H01L33/06 ; H01L33/12 ; H01L33/32 ; H01L21/205

Abstract:
A method of manufacturing a nitride semiconductor light-emitting element includes: growing an n-side superlattice layer that includes InGaN layers and GaN layers; and, after the step of growing the n-side superlattice layer, growing a light-emitting layer. The step of growing the n-side superlattice layer comprises repeating a cycle n times (n is a number of repetition), the cycle including growing one InGaN layer and growing one GaN layer. In the step of growing the n-side superlattice layer, the step of growing one GaN layer in each cycle from a first cycle to an mth cycle is performed using carrier gas that contains N2 gas and does not contain H2 gas. The step of growing one GaN layer in each cycle from a (m+1)th cycle to an nth cycle is performed using gas containing H2 gas as the carrier gas.
Public/Granted literature
- US20180226536A1 METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT Public/Granted day:2018-08-09
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