Invention Grant
- Patent Title: AlInN film, two-dimensional photonic crystal resonator, method for manufacturing these, and semiconductor light-emitting element
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Application No.: US16486556Application Date: 2018-02-26
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Publication No.: US11075322B2Publication Date: 2021-07-27
- Inventor: Yasufumi Fujiwara , Tomohiro Inaba
- Applicant: OSAKA UNIVERSITY
- Applicant Address: JP Suita
- Assignee: OSAKA UNIVERSITY
- Current Assignee: OSAKA UNIVERSITY
- Current Assignee Address: JP Suita
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2017-036446 20170228
- International Application: PCT/JP2018/006965 WO 20180226
- International Announcement: WO2018/159531 WO 20180907
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/00 ; H01L33/04

Abstract:
Provided is a technique for manufacturing a semiconductor light-emitting element for which it is possible to dramatically increase light emission efficiency to a greater degree than in the past. An AlInN film provided on a GaN epitaxial film that is formed on a substrate, wherein: the AlInN film is formed by lamination of AlInN layers; between the laminated AlInN layers, there is provided a cap layer that comprises GaN, AlN, or AlGaN, and has a thickness of 0.1-10 nm; a super lattice structure is formed; the total thickness exceeds 200 nm; and the root-mean-square height RMS is 3 nm or less. A method for forming an AlInN film, the method being such that: a step for forming an AlInN layer is repeated a plurality of times, said step involving using any of an organometallic vapor phase growth method, a molecular beam epitaxy method, and a sputtering method to form the AlInN layer to a thickness of 200 nm or less by epitaxial growth in an atmosphere of 700-850° C. on a GaN epitaxial film formed on a substrate; and the AlInN layer is grown until a prescribed thickness is reached.
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