Invention Grant
- Patent Title: Integrated circuit devices based on metal ion migration and methods of fabricating same
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Application No.: US16560777Application Date: 2019-09-04
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Publication No.: US11075337B2Publication Date: 2021-07-27
- Inventor: Ludovic Goux
- Applicant: IMEC vzw
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP18306168 20180905
- Main IPC: H01L45/00
- IPC: H01L45/00 ; C23C16/04 ; C23C16/455

Abstract:
The disclosed technology generally relates to integrated circuit (IC) devices and more particularly to IC devices based on metal ion migration, and to manufacturing of the IC devices. In one aspect, a method of manufacturing an integrated electronic circuit, which includes at least one component based on metal ion migration and reduction, allows improved control of an amount of the metal which is incorporated into the component. This amount is produced from a metal supply layer and transferred into a container selectively with respect to the rest of the component. The container is configured as part of an electrolyte portion or active electrode in the final component. The method is compatible with two-dimensional and three-dimensional configurations of the component.
Public/Granted literature
- US20200075849A1 INTEGRATED CIRCUIT DEVICES BASED ON METAL ION MIGRATION AND METHODS OF FABRICATING SAME Public/Granted day:2020-03-05
Information query
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