Invention Grant
- Patent Title: Slurry distribution device for chemical mechanical polishing
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Application No.: US15626936Application Date: 2017-06-19
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Publication No.: US11077536B2Publication Date: 2021-08-03
- Inventor: Yen-Chu Yang , Stephen Jew , Jianshe Tang , Haosheng Wu , Shou-Sung Chang , Paul D. Butterfield , Alexander John Fisher , Bum Jick Kim
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B57/02
- IPC: B24B57/02 ; B24B37/10 ; H01L21/67

Abstract:
An apparatus for chemical mechanical polishing includes a rotatable platen having a surface to support a polishing pad, a carrier head to hold a substrate in contact with the polishing pad, and a polishing liquid distribution system. The polishing liquid distribution system includes a dispenser positioned to deliver a polishing liquid to a portion of a polishing surface of the polishing pad, and a first barrier positioned before the portion of the polishing surface and configured to block used polishing liquid from reaching the portion of the polishing surface. The first barrier includes a solid first body having a first flat bottom surface and having a first leading surface configured to contact the used polishing liquid.
Public/Granted literature
- US20170368664A1 SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING Public/Granted day:2017-12-28
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