Invention Grant
- Patent Title: Process for optimizing cobalt electrofill using sacrificial oxidants
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Application No.: US16410420Application Date: 2019-05-13
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Publication No.: US11078591B2Publication Date: 2021-08-03
- Inventor: Lee J. Brogan , Natalia V. Doubina , Matthew A. Rigsby , Jonathan David Reid
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D5/04 ; C25D21/14 ; H01L21/768 ; C25D3/12 ; C25D17/00 ; C25D17/06 ; C25D21/12 ; H01L21/288 ; H01L21/66

Abstract:
Embodiments herein relate to methods, apparatus, and systems for electroplating metal into recessed features using a superconformal fill mechanism that provides relatively faster plating within a feature and relatively slower plating in the field region. Moreover, within the feature, plating occurs faster toward the bottom of the feature compared to the top of the feature. The result is that the feature is filled with metal from the bottom upwards, resulting in a high quality fill without the formation of seams or voids, defects that are likely where a conformal fill mechanism is used. The superconformal fill mechanism relies on the presence of a sacrificial oxidant molecule that is used to develop a differential current efficiency within the feature compared to the field region. Various plating conditions are balanced against one another to ensure that the feature fills from the bottom upwards. No organic plating additives are necessary, though plating additives can be used to improve the process.
Public/Granted literature
- US20190271094A1 PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS Public/Granted day:2019-09-05
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