Invention Grant
- Patent Title: Method for producing silicon carbide single crystal
-
Application No.: US16468413Application Date: 2017-12-15
-
Publication No.: US11078598B2Publication Date: 2021-08-03
- Inventor: Yohei Fujikawa , Hidetaka Takaba
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2016-251177 20161226
- International Application: PCT/JP2017/045090 WO 20171215
- International Announcement: WO2018/123652 WO 20180705
- Main IPC: C30B29/36
- IPC: C30B29/36 ; C30B23/06 ; C30B23/00

Abstract:
A silicon carbide single crystal is grown by a method comprising: a single crystal growth step of growing a silicon carbide single crystal so as to not close a gap between a side surface of the silicon carbide single crystal growing on a silicon carbide seed crystal, and an inner-side surface of a guide member and a crystal deposited on the inner-side surface of the guide member; a crystal growth termination step of terminating crystal growth by temperature lowering; and a gap enlargement step, performed between the single crystal growth step and the crystal growth termination step, of enlarging the gap by maintaining a difference, Pin−Pout, between partial pressure Pin of Si2C in a source gas in the vicinity of an inlet of the gap and partial pressure Pout of Si2C in a source gas in the vicinity of an outlet of the gap at 0.18 torr or less.
Public/Granted literature
- US20210230768A2 METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL Public/Granted day:2021-07-29
Information query
IPC分类: