Invention Grant
- Patent Title: Cryopump, cryopump controller, and cryopump control method
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Application No.: US15465283Application Date: 2017-03-21
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Publication No.: US11078900B2Publication Date: 2021-08-03
- Inventor: Kakeru Takahashi
- Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JPJP2016-057050 20160322
- Main IPC: F04B49/06
- IPC: F04B49/06 ; F04B37/08

Abstract:
A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.
Public/Granted literature
- US20170276128A1 CRYOPUMP, CRYOPUM CONTROLLER, AND CRYOPUMT CONTROL METHOD Public/Granted day:2017-09-28
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