- Patent Title: Methods and apparatuses for aligning and diagnosing a laser beam
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Application No.: US15655079Application Date: 2017-07-20
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Publication No.: US11079564B2Publication Date: 2021-08-03
- Inventor: Donald Harrison Barnhart
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G02B7/00
- IPC: G02B7/00 ; G01J1/04 ; G03F7/20 ; G01J1/42 ; G02B26/10

Abstract:
Methods and apparatuses for aligning and diagnosing the laser beam traversing an optical train in a highly space-efficient, lower cost and/or retrofit-friendly manner are disclosed. The optical components of the optical train are mounted such that one or more optical components can direct their exit laser beam to partially or wholly scan across one or more downstream sensors. Correlation data between physical disposition of optical components and the points of impact data and/or beam quality data are employed to, among others, align and/or diagnose the laser beam and/or localize failure sites and/or optimize maintenance schedule.
Public/Granted literature
- US20190025536A1 METHODS AND APPARATUSES FOR ALIGNING AND DIAGNOSING A LASER BEAM Public/Granted day:2019-01-24
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |