Invention Grant
- Patent Title: Method and system for layout enhancement based on inter-cell correlation
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Application No.: US16538654Application Date: 2019-08-12
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Publication No.: US11079672B2Publication Date: 2021-08-03
- Inventor: Wei-Lin Chu , Hsin-Lun Tseng , Sheng-Wen Huang , Chih-Chung Huang , Chi-Ming Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: G06F30/30
- IPC: G06F30/30 ; G03F1/70 ; G03F1/36 ; G03F1/22 ; G03F7/20 ; G06N20/00 ; G06F30/392

Abstract:
A method and a system of performing layout enhancement include: providing a first design layout comprising a plurality of cells; updating a first cell in the plurality of cells using optical proximity correction to provide a first updated cell and a data set; updating a second cell from remaining cells in the first design layout based on the data set to provide a second updated cell; and manufacturing a mask based on the first updated cell and the second updated cell in the first design layout.
Information query