Invention Grant
- Patent Title: Set/reset methods for crystallization improvement in phase change memories
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Application No.: US16912719Application Date: 2020-06-26
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Publication No.: US11081174B2Publication Date: 2021-08-03
- Inventor: Zhaoqiang Bai , Mac D. Apodaca , Michael K. Grobis , Michael Nicolas Albert Tran , Neil Leslie Robertson , Gerardo A. Bertero
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: Vierra Magen Marcus LLP
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H01L27/24 ; H01L45/00

Abstract:
A two-step SET pulse may be applied to a phase change material of a phase change memory cell in which a first lower SET pulse is applied to make the phase change material dwell at 600K to incubate nuclei near the maximum nucleation rate and then a second higher SET pulse is immediately applied to make the phase change material dwell at 720K to maximize crystal growth. Moreover, the slope of the falling edge of a RESET pulse applied prior to the two-step SET pulse may be adjusted to increase the number of nuclei (e.g., formed with a steeper falling edge) to increase SET efficiency at the expense of a more stable amorphous phase (e.g., formed with a less steep falling edge) that improves data retention.
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