Invention Grant
- Patent Title: Methods of manufacturing an encapsulated semiconductor device
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Application No.: US16665499Application Date: 2019-10-28
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Publication No.: US11081370B2Publication Date: 2021-08-03
- Inventor: Ronald Patrick Huemoeller , Sukianto Rusli , David Jon Hiner
- Applicant: Amkor Technology Singapore Holding Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: H01K3/10
- IPC: H01K3/10 ; H01L21/56 ; H05K3/28

Abstract:
A method of manufacturing a semiconductor package includes mounting and electrically connecting a semiconductor die to a substrate. The semiconductor die and the substrate are encapsulated to form an encapsulation. Via holes are laser-ablated through the encapsulation and conductive material is deposited within the via holes to form vias. A first buildup dielectric layer is formed on the encapsulation. Laser-ablated artifacts are laser-ablated in the first buildup layer. The laser-ablated artifacts in the first buildup layer are filled with a first metal layer to form a first electrically conductive pattern in the first build up layer. The operations of forming a buildup layer, forming laser-ablated artifacts in the buildup layer, and filling the laser-ablated artifacts with an electrically conductive material to form an electrically conductive pattern can be performed any one of a number of times to achieve the desired redistribution.
Public/Granted literature
- US20200066547A1 ENCAPSULATED SEMICONDUCTOR PACKAGE Public/Granted day:2020-02-27
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