Invention Grant
- Patent Title: Methods and apparatuses for reflowing conductive elements of semiconductor devices
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Application No.: US15898019Application Date: 2018-02-15
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Publication No.: US11081458B2Publication Date: 2021-08-03
- Inventor: James M. Derderian
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683 ; H01L21/268 ; H01L21/78 ; H01L21/67 ; B23K1/005 ; B23K101/40

Abstract:
Methods of reflowing electrically conductive elements on a wafer may involve directing a laser beam toward a region of a surface of a wafer supported on a film of a film frame to reflow at least one electrically conductive element on the surface of the wafer. In some embodiments, the wafer may be detached from a carrier substrate and be secured to the film frame before laser reflow. Apparatus for performing the methods, and methods of repairing previously reflowed conductive elements on a wafer are also disclosed.
Public/Granted literature
- US20190252337A1 METHODS AND APPARATUSES FOR REFLOWING CONDUCTIVE ELEMENTS OF SEMICONDUCTOR DEVICES Public/Granted day:2019-08-15
Information query
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