Invention Grant
- Patent Title: Active matrix substrate, x-ray imaging panel with the same, and method of manufacturing the same
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Application No.: US16661292Application Date: 2019-10-23
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Publication No.: US11081517B2Publication Date: 2021-08-03
- Inventor: Katsunori Misaki
- Applicant: SHARP KABUSHIKI KAISHA
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: ScienBiziP, P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/12 ; H01L21/4757 ; G01T1/24 ; H01L29/786 ; H01L29/66 ; H01L31/115 ; G01T1/20

Abstract:
An active matrix substrate includes a TFT. The TFT includes a gate electrode, a semiconductor layer overlapping the gate electrode with a gate insulating film interposed therebetween, and a source electrode and a drain electrode disposed on the semiconductor layer. The source electrode, the drain electrode, and the semiconductor layer are covered with a first insulating film. The gate insulating film includes a first stepped portion in a portion covering a peripheral portion of the gate electrode. The first insulating film includes a first opening at a position overlapping a portion of the first stepped portion that is not covered with the source electrode and the drain electrode in a plan view.
Information query
IPC分类: