Memory and method for forming the same
Abstract:
The present disclosure provides a memory and a method for forming the memory. The method includes: providing a base with a first fin and a second fin formed thereon, wherein the first fin comprises an erasing region and a floating gate region on both sides of the erasing region, and a sacrificial layer is disposed on a surface of the erasing region and a surface of the second fin; forming a floating gate structure across the floating gate region on the base; forming a first sidewall film on a top surface and sidewall surfaces of the floating gate structure on the base; removing the sacrificial layer, and forming an opening in the floating gate structure and the first sidewall film; and forming an erasing gate structure in the opening. The memory formed by the method has good performance.
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