Invention Grant
- Patent Title: Memory and method for forming the same
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Application No.: US16788943Application Date: 2020-02-12
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Publication No.: US11081557B2Publication Date: 2021-08-03
- Inventor: Tao Yu
- Applicant: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee Address: CN Shanghai
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201910686955.X 20190729
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/28 ; H01L21/265 ; H01L21/768 ; H01L23/535 ; H01L29/66 ; H01L29/78 ; H01L29/788

Abstract:
The present disclosure provides a memory and a method for forming the memory. The method includes: providing a base with a first fin and a second fin formed thereon, wherein the first fin comprises an erasing region and a floating gate region on both sides of the erasing region, and a sacrificial layer is disposed on a surface of the erasing region and a surface of the second fin; forming a floating gate structure across the floating gate region on the base; forming a first sidewall film on a top surface and sidewall surfaces of the floating gate structure on the base; removing the sacrificial layer, and forming an opening in the floating gate structure and the first sidewall film; and forming an erasing gate structure in the opening. The memory formed by the method has good performance.
Public/Granted literature
- US20210036117A1 Memory And Method For Forming The Same Public/Granted day:2021-02-04
Information query
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