Invention Grant
- Patent Title: Integrated sensor of ionizing radiation and ionizing particles
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Application No.: US16758088Application Date: 2018-10-22
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Publication No.: US11081614B2Publication Date: 2021-08-03
- Inventor: Angelo Rivetti , Lucio Pancheri , Piero Giubilato , Manuel Dionisio Da Rocha Rolo , Giovanni Margutti , Onorato Di Cola
- Applicant: LFOUNDRY S.R.L.
- Applicant Address: IT Avezzano
- Assignee: LFOUNDRY S.R.L.
- Current Assignee: LFOUNDRY S.R.L.
- Current Assignee Address: IT Avezzano
- Agency: Lucas & Mercanti, LLP
- Priority: IT102017000122669 20171027
- International Application: PCT/IB2018/058186 WO 20181022
- International Announcement: WO2019/082045 WO 20190502
- Main IPC: H01L31/115
- IPC: H01L31/115 ; H01L31/117 ; H01L31/02 ; H01L31/0224

Abstract:
This disclosure provides a semiconductor sensor of ionizing radiation and/or ionizing particles with a backside bias electrode and a backside junction for completely depleting the semiconductor substrate up to carrier collection regions each connected to a respective collection electrode of carriers generated by ionization in the substrate. Differently from prior sensors, the sensor of this disclosure has an intermediate semiconductor layer formed upon the substrate, having a greater doping concentration than the doping concentration of the substrate and a doping of a same type. In this intermediate layer, buried doped regions of opposite type one separated from the other are formed for shielding superficial regions in which readout circuits are defined.
Public/Granted literature
- US20200328321A1 INTEGRATED SENSOR OF IONIZING RADIATION AND IONIZING PARTICLES Public/Granted day:2020-10-15
Information query
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