Invention Grant
- Patent Title: Laminate structure, piezoelectric element, and method of manufacturing piezoelectric element
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Application No.: US15846258Application Date: 2017-12-19
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Publication No.: US11081637B2Publication Date: 2021-08-03
- Inventor: Takamichi Fujii , Takayuki Naono
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2015-131539 20150630
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/09 ; H01L41/316 ; H01L41/313 ; H01L41/08

Abstract:
A piezoelectric element is obtained using a method including: preparing a first structure; preparing a second structure; disposing a first facing electrode layer of the first structure to face a first surface of a vibration plate substrate and bonding the first structure to the first surface of the vibration plate substrate; processing the vibration plate substrate into a vibration plate by polishing or etching a second surface of the vibration plate substrate to which the first structure is bonded; preparing a laminate structure by disposing a second facing electrode layer of the second structure to face an exposed surface of the vibration plate and bonding the second structure to the vibration plate; and removing at least a part of a first silicon substrate of the first structure and a second silicon substrate of the second structure from the laminate structure.
Public/Granted literature
- US20180123017A1 LAMINATE STRUCTURE, PIEZOELECTRIC ELEMENT, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT Public/Granted day:2018-05-03
Information query
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