Invention Grant
- Patent Title: Laser light energy and dose control using repetition rate based gain estimators
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Application No.: US15495245Application Date: 2017-04-24
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Publication No.: US11081852B2Publication Date: 2021-08-03
- Inventor: Yingbo Zhao , Kevin O'Brien
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/09 ; H01S3/131 ; G03F7/20 ; H01S3/13 ; H01S3/104

Abstract:
A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser light pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the laser source, and updated. The resulting generated laser light thereby avoids the convergence delay inherent in prior laser systems and, further, can repeatedly do so with subsequent specified repetition rates.
Public/Granted literature
- US20180309259A1 LASER LIGHT ENERGY AND DOSE CONTROL USING REPETITION RATE BASED GAIN ESTIMATORS Public/Granted day:2018-10-25
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