Invention Grant
- Patent Title: Acoustic wave device
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Application No.: US15885276Application Date: 2018-01-31
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Publication No.: US11082027B2Publication Date: 2021-08-03
- Inventor: Motoi Yamauchi
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JPJP2017-017850 20170202,JPJP2017-020744 20170207
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/05 ; H03H9/13 ; H03H9/145 ; H01L41/187

Abstract:
An acoustic wave device includes: a first substrate made of a piezoelectric material; an acoustic wave element located on the first substrate; a bump located on the first substrate; a second substrate located on the first substrate through the bump, the second substrate facing the first substrate across an air gap; and a support layer that is located in at least a part of a periphery of the first substrate, is in contact with a side surface of the first substrate, and has a less linear thermal expansion coefficient than the first substrate.
Public/Granted literature
- US20180219527A1 ACOUSTIC WAVE DEVICE Public/Granted day:2018-08-02
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