Invention Grant
- Patent Title: Exhaust system and exhaust method
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Application No.: US17061899Application Date: 2020-10-02
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Publication No.: US11090619B2Publication Date: 2021-08-17
- Inventor: Keisuke Matsushima , Kazutomo Miyazaki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-186629 20191010
- Main IPC: B01F3/02
- IPC: B01F3/02 ; G03F7/20 ; G05D11/02

Abstract:
An exhaust system capable of diluting a hydrogen gas to a concentration below the lower explosive limit without requiring a large amount of dilution gas while preventing an increase in a pressure of an exhaust gas in a buffer tank is disclosed. The exhaust system performs, when a main valve disposed in an exhaust line is closed, an initial exhaust operation in which a gas heavier than the hydrogen gas is discharged from a lower part of a buffer tank while an inlet valve disposed in an inlet line and a first outlet valve disposed in an outlet line are opened to introduce the exhaust gas from an equipment in a tangential direction of a buffer tank. Next, the exhaust system performs a hydrogen-gas discharge operation in which the inlet valve and the first outlet valve are closed, and the a bypass valve disposed in a bypass line and the second outlet valve disposed in a hydrogen-gas discharge line are opened to discharge the hydrogen gas stayed in an upper part of the buffer tank while flowing the exhaust gas into a bypass line.
Public/Granted literature
- US20210106955A1 EXHAUST SYSTEM AND EXHAUST METHOD Public/Granted day:2021-04-15
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