Invention Grant
- Patent Title: Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the methods
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Application No.: US13854856Application Date: 2013-04-01
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Publication No.: US11090778B2Publication Date: 2021-08-17
- Inventor: Thomas West , Peter McKeever , Kevin Song , Donald Dietz , Long Nguyen , Matt Richardson
- Applicant: Thomas West, Inc.
- Applicant Address: US CA Sunnyvale
- Assignee: Thomas West, Inc.
- Current Assignee: Thomas West, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Carr & Ferrell LLP
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B37/26 ; B24D18/00 ; B24D11/00 ; B29C41/04

Abstract:
A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer mixture. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has gelled. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymer mixtures. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
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