Semiconductor device with air gap and method for preparing the same
Abstract:
The present disclosure provides a semiconductor device and a method for preparing the semiconductor device. The semiconductor device includes a plurality of spacer bit lines disposed over a substrate; a plurality of dielectric pillars disposed over the substrate, between the plurality of spacer bit lines; and a sealing dielectric layer disposed over the plurality of spacer bit lines and the plurality of dielectric pillars such that air gaps are formed between the sealing dielectric layer and the substrate.
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