- Patent Title: Semiconductor device with air gap and method for preparing the same
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Application No.: US16585414Application Date: 2019-09-27
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Publication No.: US11094632B2Publication Date: 2021-08-17
- Inventor: Chih-Tsung Wu
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/02 ; H01L21/768 ; H01L27/108 ; H01L23/528 ; H01L21/311 ; H01L21/321

Abstract:
The present disclosure provides a semiconductor device and a method for preparing the semiconductor device. The semiconductor device includes a plurality of spacer bit lines disposed over a substrate; a plurality of dielectric pillars disposed over the substrate, between the plurality of spacer bit lines; and a sealing dielectric layer disposed over the plurality of spacer bit lines and the plurality of dielectric pillars such that air gaps are formed between the sealing dielectric layer and the substrate.
Public/Granted literature
- US20210098389A1 SEMICONDUCTOR DEVICE WITH AIR GAP AND METHOD FOR PREPARING THE SAME Public/Granted day:2021-04-01
Information query
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