Invention Grant
- Patent Title: Interconnect landing method for RRAM technology
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Application No.: US16695537Application Date: 2019-11-26
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Publication No.: US11094744B2Publication Date: 2021-08-17
- Inventor: Hsia-Wei Chen , Chih-Yang Chang , Chin-Chieh Yang , Jen-Sheng Yang , Kuo-Chi Tu , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/105
- IPC: H01L27/105 ; H01L23/522 ; H01L23/528 ; H01L27/24 ; H01L45/00 ; H01L27/102

Abstract:
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a memory device over a substrate and forming an inter-level dielectric (ILD) layer over the memory device. The ILD layer is selectively etched to define a first cavity that exposes a top of the memory device and to define a second cavity that is laterally separated from the first cavity by the ILD layer. The second cavity is defined by a smooth sidewall of the ILD layer that extends between upper and lower surfaces of the ILD layer. A conductive material is formed within the first cavity and the second cavity.
Public/Granted literature
- US20200098828A1 INTERCONNECT LANDING METHOD FOR RRAM TECHNOLOGY Public/Granted day:2020-03-26
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