Invention Grant
- Patent Title: Structure and formation method of semiconductor device with magnetic element covered by polymer material
-
Application No.: US16432625Application Date: 2019-06-05
-
Publication No.: US11094776B2Publication Date: 2021-08-17
- Inventor: Chi-Cheng Chen , Wei-Li Huang , Chun-Yi Wu , Kuang-Yi Wu , Hon-Lin Huang , Chih-Hung Su , Chin-Yu Ku , Chen-Shien Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L49/02 ; H01F41/04 ; H01L23/00 ; H01L21/768 ; H01L23/31 ; H01L23/532

Abstract:
A structure and a formation method of a semiconductor device are provided. The method includes forming a passivation layer over a semiconductor substrate. The method also includes forming a magnetic element over the passivation layer. The method further includes forming an isolation layer over the magnetic element and the passivation layer. The isolation layer includes a polymer material. In addition, the method includes forming a conductive line over the isolation layer, and the conductive line extends across the magnetic element.
Public/Granted literature
- US20200075448A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH MAGNETIC ELEMENT Public/Granted day:2020-03-05
Information query
IPC分类: