Invention Grant
- Patent Title: Plating apparatus and plating method
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Application No.: US16154226Application Date: 2018-10-08
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Publication No.: US11098413B2Publication Date: 2021-08-24
- Inventor: Shao Hua Chang , Tomonori Hirao
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2017-198557 20171012
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D21/12 ; C25D7/12 ; C25D21/10

Abstract:
To reduce fluctuation of the liquid level of plating solution caused by the operation of a paddle. A plating apparatus for plating a substrate is provided. The plating apparatus includes: a plating bath configured to store plating solution; a paddle that is arranged in the plating bath and configured to stir the plating solution; and a liquid level fluctuation reducing member that is arranged in the plating bath, has a flow path through which the plating solution passes, and is configured to increase a flow velocity of the plating solution passing through the flow path to attenuate energy of waves formed by the plating solution.
Public/Granted literature
- US20190112727A1 PLATING APPARATUS AND PLATING METHOD Public/Granted day:2019-04-18
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