Invention Grant
- Patent Title: Prestrained vibrating accelerometer
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Application No.: US16301384Application Date: 2017-05-09
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Publication No.: US11099205B2Publication Date: 2021-08-24
- Inventor: Marc Faucher , Christophe Morelle
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , UNIVERSITE DE LILLE
- Applicant Address: FR Paris; FR Lille
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE LILLE
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE LILLE
- Current Assignee Address: FR Paris; FR Lille
- Agency: Nixon & Vanderhye
- Priority: FR1654199 20160511
- International Application: PCT/EP2017/061007 WO 20170509
- International Announcement: WO2017/194509 WO 20171116
- Main IPC: G01P15/09
- IPC: G01P15/09 ; G01P15/097 ; G01P1/00

Abstract:
A device for measuring an acceleration includes a vibrating accelerometer including: a semiconductor substrate forming a fixed frame of the accelerometer; a test weight of the same material as the substrate and connected to the fixed frame, movable translationally along at least one sensing axis of the vibrating accelerometer; a guide of the same material as the substrate, connected to the fixed frame and test weight, guiding the test weight in the direction of the sensing axis; a layer made of a piezoelectric semiconductor deposited on the substrate, the layer being tensilely prestrained; a resonator in the layer connected to the fixed frame, the resonator subjected to tension or compression in the direction of the sensing axis; and at least one transducer connected to the resonator, able to actuate the resonator, to keep the resonator oscillating and/or to detect an electrical signal generated by the resonator.
Public/Granted literature
- US20200319227A1 PRESTRAINED VIBRATING ACCELEROMETER Public/Granted day:2020-10-08
Information query
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